1200℃ single-heating zone low vacuum CVD system consists of a single heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The system is equipped with a three-channel mass flow meter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
1200℃ single-heating zone low vacuum CVD system applications:
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
1200℃ single-heating zone low vacuum CVD system technical parameters:
Vacuum tube furnace | Model | CY-O1200-50IT |
Tube material | High purity quartz |
Tube diameter | 50mm (Optional 60mm, 80mm, 100mm) |
Tube length | 800mm |
Furnace chamber length | 440mm |
Heating zone length | 400mm |
Constant temperature zone | 200mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | LCD |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
Gas supply system | Model | CY-3Z |
Gas channel | 3-channel |
Measuring unit | Gas mass flowmeter |
Measuring range | A channel: 0～100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. |
B channel: 0～300SCCM N2 gas |
C channel: 0～500SCCM Ar gas |
measurement accuracy | ±1.0%F.S |
Pipe pressure resistance | 3MPa |
Working pressure difference | 50～300KPa |
Connecting pipe | 304 stainless steel |
Gas channel | 304 stainless steel needle valve |
Interface specification | 1/4" ferrule connector for gas inlet and outlet |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S |
Exhaust interface | KF16 |
Vacuum measurement | Resistance gauge |
Ultimate vacuum | 1.0E-1Pa |
Power supply | AC:220V 50/60Hz |
Pumping interface | KF16 |
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